ISO 14644-1 cleanroom standards
Class | maximum particles/m³ | FED STD 209E equivalent | |||||
---|---|---|---|---|---|---|---|
≥0.1 µm | ≥0.2 µm | ≥0.3 µm | ≥0.5 µm | ≥1 µm | ≥5 µm | ||
ISO 1 | 10 | 2 | |||||
ISO 2 | 100 | 24 | 10 | 4 | |||
ISO 3 | 1,000 | 237 | 102 | 35 | 8 | Class 1 | |
ISO 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | Class 10 | |
ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 | Class 100 |
ISO 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | Class 1000 |
ISO 7 | 352,000 | 83,200 | 2,930 | Class 10,000 | |||
ISO 8 | 3,520,000 | 832,000 | 29,300 | Class 100,000 | |||
ISO 9 | 35,200,000 | 8,320,000 | 293,000 | Room air |
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